Design, modeling and control of nanopositioning systems
- Creator: Fleming, Andrew J. , Leang, Kam K.
- Resource Type: book
- Date: 2014
An experimental comparison of PI, inversion, and damping control for high performance nanopositioning
- Creator: Fleming, Andrew J. , Leang, Kam K.
- Resource Type: conference paper
- Date: 2013
Compact ultra-fast vertical nanopositioner for improving scanning probe microscope scan speed
- Creator: Kenton, Brian J. , Fleming, Andrew J. , Leang, Kam K.
- Resource Type: journal article
- Date: 2011
High performance nanopositioning with integrated strain and force feedback
- Creator: Fleming, Andrew J. , Leang, Kam K.
- Resource Type: conference paper
- Date: 2010
Integrated strain and force feedback for high-performance control of piezoelectric actuators
- Creator: Fleming, Andrew J. , Leang, Kam K.
- Resource Type: journal article
- Date: 2010
Ultra-fast dual-stage vertical positioning for high performance SPMs
- Creator: Fleming, Andrew J. , Kenton, Brian J. , Leang, Kam K.
- Resource Type: conference paper
- Date: 2010
High-speed serial-kinematic SPM scanner: design and drive considerations
- Creator: Leang, Kam K. , Fleming, Andrew J.
- Resource Type: journal article
- Date: 2009
Evaluation of charge drives for scanning probe microscope positioning stages
- Creator: Fleming, Andrew J. , Leang, Kam K.
- Resource Type: conference paper
- Date: 2008
High-speed serial-kinematic AFM scanner: design and drive considerations
- Creator: Leang, Kam K. , Fleming, Andrew J.
- Resource Type: conference paper
- Date: 2008